Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385132 | Substrate processing apparatus and substrate processing method | Ibuki HAYASHI, Yasushi Takeuchi, Junnosuke TAGUCHI | 2025-08-12 |
| 12385136 | Apparatus for performing film forming process on substrate, and method of exhausting processing gas from apparatus for performing film forming process on substrate | — | 2025-08-12 |
| 12359302 | Film deposition apparatus and film deposition method | — | 2025-07-15 |
| 12297536 | Substrate processing apparatus and substrate processing method | — | 2025-05-13 |
| 12247287 | Apparatus for performing film forming process on substrate and method of using vacuum chuck mechanism provided in the apparatus | — | 2025-03-11 |