Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429782 | Substrate processing apparatus and substrate processing method | — | 2025-09-30 |
| 12315752 | Substrate treatment apparatus and transfer schedule creation method | Yuichiro Kawasaki | 2025-05-27 |