Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321098 | Substrate support member, substrate treatment apparatus, and substrate transfer apparatus | — | 2025-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321098 | Substrate support member, substrate treatment apparatus, and substrate transfer apparatus | — | 2025-06-03 |