Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12415230 | Substrate processing apparatus and substrate processing method | — | 2025-09-16 |
| 12397375 | Processing apparatus and processing method | Yohei Yamashita, Hayato TANOUE | 2025-08-26 |
| 12377497 | Substrate processing apparatus and substrate processing method | Hayato TANOUE, Yoshihiro Kawaguchi | 2025-08-05 |
| 12230540 | Substrate processing system and substrate processing method | Yoshihiro Kawaguchi, Kazuya Hisano | 2025-02-18 |
| 12191168 | Laser processing device, laser processing system and laser processing method | Yoshihiro Kawaguchi, Hayato TANOUE, Kazuya Hisano | 2025-01-07 |