Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288678 | Substrate processing apparatus and substrate transfer position adjustment method | Joji TAKAYOSHI, Hidehiko Sato, Yuri Kimura | 2025-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288678 | Substrate processing apparatus and substrate transfer position adjustment method | Joji TAKAYOSHI, Hidehiko Sato, Yuri Kimura | 2025-04-29 |