Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227843 | Film forming method and tungsten film | Takuya KAWAGUCHI, Takanobu HOTTA | 2025-02-18 |
| 12221693 | Stress reducing method | Takuya KAWAGUCHI, Takanobu HOTTA | 2025-02-11 |
| 12188125 | Showerhead and substrate processing apparatus | Takanobu HOTTA, Takuya KAWAGUCHI, Toshio Takagi, Takashi Kakegawa | 2025-01-07 |