Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362158 | Method for OES data collection and endpoint detection | Sergey Voronin, Blaze Messer, Yan Chen, Joel Ng, Ashawaraya Shalini +1 more | 2025-07-15 |
| 12306044 | Optical emission spectroscopy for advanced process characterization | Sergey Voronin, Blaze Messer, Yan Chen, Joel Ng, Ashawaraya Shalini +1 more | 2025-05-20 |