Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387907 | Plasma processing apparatus and substrate processing method | — | 2025-08-12 |
| 12362144 | Plasma processing apparatus and method for controlling source frequency of source radio-frequency power | — | 2025-07-15 |
| 12334305 | Plasma processing apparatus | — | 2025-06-17 |
| 12300465 | Plasma processing apparatus | — | 2025-05-13 |
| 12266511 | Substrate support and substrate processing apparatus | — | 2025-04-01 |
| 12261027 | Plasma processing apparatus and plasma processing method | Natsumi TORII, Koichi Nagami, Jun Abe | 2025-03-25 |
| 12249487 | Plasma processing apparatus and plasma processing method | — | 2025-03-11 |
| 12249486 | Plasma processing apparatus and plasma processing method | — | 2025-03-11 |