Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197121 | Phase shift mask blank, manufacturing method of phase shift mask, and phase shift mask | Naoki Matsuhashi, Takuro Kosaka | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197121 | Phase shift mask blank, manufacturing method of phase shift mask, and phase shift mask | Naoki Matsuhashi, Takuro Kosaka | 2025-01-14 |