Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429760 | Method for forming structure of pellicle-mask structure with vent structure | — | 2025-09-30 |
| 12298662 | Mask for EUV lithography and method of manufacturing the same | — | 2025-05-13 |
| 12266525 | Photomask pellicle including network of nanowires and method of forming the same | Chen-Chieh Yu | 2025-04-01 |
| 12253796 | Extreme ultraviolet mask and method for forming the same | — | 2025-03-18 |
| 12253797 | Pellicle design for mask application | — | 2025-03-18 |
| 12222639 | Extreme ultraviolet mask and method of manufacturing the same | — | 2025-02-11 |
| 12210280 | EUV photo masks and manufacturing method thereof | — | 2025-01-28 |