Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215414 | Shutter disc for a semiconductor processing tool | Yi-Lin Wang, Chin-Szu Lee, Hua-Sheng Chiu, Zih-Shou MUE | 2025-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215414 | Shutter disc for a semiconductor processing tool | Yi-Lin Wang, Chin-Szu Lee, Hua-Sheng Chiu, Zih-Shou MUE | 2025-02-04 |