Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371780 | Vacuum systems in semiconductor fabrication facilities | Ming-Fa Wu, Huai-Tei Yang | 2025-07-29 |
| 12359313 | Deposition apparatus and method of forming metal oxide layer using the same | Ming-Fa Wu, Jheng-Long Chen | 2025-07-15 |
| 12331398 | Method of forming metal oxide layer using deposition apparatus | Ming-Fa Wu, Jheng-Long Chen | 2025-06-17 |