Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406869 | Systems and methods for humidity control of FOUP during semiconductor fabrication | Kuang-Wei Cheng, Cheng-Lung Wu, Yi-Fam Shiu, Chyi-Tsong Ni | 2025-09-02 |
| 12325913 | Deflector for chamber cleaning | Kuang-Wei Cheng, Yung-Tsun Liu, Chih-Tsung Lee, Chyi-Tsong Ni | 2025-06-10 |
| 12276024 | Device and methods for chemical vapor deposition | Yung-Tsun Liu, Kuang-Wei Cheng, Chih-Tsung Lee, Chyi-Tsong Ni | 2025-04-15 |