Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416864 | Tool mismatch reduction using aberration map of the tools | Shih-Chuan Huang, Shih-Ming Chang, Ken-Hsien Hsieh | 2025-09-16 |
| 12386251 | Method and system to introduce bright field imaging at stitching area of high-NA EUV exposure | Ken-Hsien Hsieh, Manuel Lopez, Yu-Tse LAI | 2025-08-12 |
| 12321099 | Method for generating EUV radiation | Shih-Ming Chang | 2025-06-03 |
| 12189284 | Method for forming semiconductor device | Ken-Hsien Hsieh | 2025-01-07 |