Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412016 | Method and structure for mandrel and spacer patterning | Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Shih-Chi Fu | 2025-09-09 |
| 12394633 | Method of fabricating semiconductor device with reduced trench distortions | Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more | 2025-08-19 |
| 12334342 | Pattern fidelity enhancement | Yu-Tien Shen, Ya-Wen Yeh, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2025-06-17 |