Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215422 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, TAI-PIN LIU, Shyue-Shin Tsai, Keith Kuang-Kuo Koai | 2025-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215422 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, TAI-PIN LIU, Shyue-Shin Tsai, Keith Kuang-Kuo Koai | 2025-02-04 |