Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422744 | Photomask inspection method and apparatus thereof | Hsin-Fu Tseng, Chien-Lin Chen | 2025-09-23 |
| 12405527 | Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomask | Tzu Han Liu, Chung-Hung Lin | 2025-09-02 |
| 12400890 | Apparatus for fabricating a semiconductor device and method for fabricating semiconductor device | Po-Chien Huang, Chung-Hung Lin | 2025-08-26 |
| 12399439 | Pellicle, pellicle removal tool, and method of utilizing pellicle and pellicle removal tool | Hsuan Jung Chang, Kun-Lung Hsieh, Ting-Hsien Ko | 2025-08-26 |
| 12282264 | Cleaning apparatus for cleaning surface of photomask | Ting-Hsien Ko, Chung-Hung Lin | 2025-04-22 |
| 12242182 | Method for removing particles from pellicle and photomask | Tzu Han Liu, Chung-Hung Lin | 2025-03-04 |
| 12189283 | Particle prevention method in reticle pod | Tzu Han Liu, Chung-Hung Lin | 2025-01-07 |