Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359307 | In situ and tunable deposition of a film | Yen-Yu Chen, Jen-Hao Chien | 2025-07-15 |
| 12334319 | Physical vapor deposition (PVD) with target erosion profile monitoring | Yen-Yu Chen | 2025-06-17 |
| 12237159 | Deposition apparatus, deposition target structure, and method | Yen-Yu Chen | 2025-02-25 |
| 12198927 | Deposition system and method | Yen-Yu Chen | 2025-01-14 |