Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285840 | Polishing head, polishing apparatus, and method of manufacturing semiconductor wafer | Yuki Nakano, Takayuki Kihara, Hiroki Ota | 2025-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285840 | Polishing head, polishing apparatus, and method of manufacturing semiconductor wafer | Yuki Nakano, Takayuki Kihara, Hiroki Ota | 2025-04-29 |