KO

Kazuhiro Ohkubo

SU Sumco: 1 patents #6 of 54Top 15%
Overall (2025): #323,038 of 469,880Top 70%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12205830 Cleaning apparatus for semiconductor wafer and method of cleaning semiconductor wafer Kaito NODA, Yuki NAKAO, Michihiko TOMITA 2025-01-21