Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198901 | Method for cleaning chamber of substrate processing apparatus | Yong Hyun Kim, Yoon J. Kim, Jae Wan Lee, Chul Joo HWANG | 2025-01-14 |
| 12188126 | Substrate processing apparatus | Jae Wan Lee, Yong Hyun Kim, Yoon J. Kim, Yun Hoe KIM, Gu Hyun JUNG +3 more | 2025-01-07 |