Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322637 | Wafer processing laminate, temporary adhesive material for wafer processing, and method for manufacturing thin wafer | Mitsuo Muto, Michihiro Sugo | 2025-06-03 |
| 12187989 | Cleaning solution for temporary adhesive for substrates, substrate cleaning method, and cleaning method for support or substrate | Michihiro Sugo, Masahito Tanabe | 2025-01-07 |