Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412761 | Method of controlling the patterned wafer process temperature using the contact type thermometer in the front side of a dummy substrate to accurately measure emissivity in order to perform temperature measurement using radiation thermometer | Takahiro Kitazawa | 2025-09-09 |