Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412756 | Processing liquid supply device, substrate processing apparatus, and method for inspecting processing liquid supply device | Hiroaki Kobayashi, Hideki Mori | 2025-09-09 |
| 12347699 | Supply tank, supply device and supply system | Hiroaki Kobayashi, Hideki Mori | 2025-07-01 |
| 12318803 | Supply device and supply system | Hiroaki Kobayashi, Hideki Mori | 2025-06-03 |
| 12257595 | Processing liquid supply device, substrate processing apparatus, and processing liquid supply method | Hiroaki Kobayashi, Hideki Mori | 2025-03-25 |