Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431354 | Silicon nitride and silicon oxide deposition methods using fluorine inhibitor | Takashi Mizoguchi, Eiichiro Shiba, Sunja Kim | 2025-09-30 |
| 12392038 | Thin-film deposition method and system | SeokJae Oh, HyunGyu Jang, HeeSung Kang, WanGyu Lim, HyounMo Choi +1 more | 2025-08-19 |
| 12283479 | Substrate processing method | JaeOk Ko, HeeSung Kang, JaeBin Ahn, SeokJae Oh, WanGyu Lim +2 more | 2025-04-22 |
| 12214741 | Gas generator | Tomoya Shimizu, Haruki TAKIZAWA, Yuji Inoue | 2025-02-04 |