Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308257 | Wafer treatment apparatus and method for reducing scattering of treatment liquid | Young Jin Kim, Eunhyeok Choi | 2025-05-20 |
| 12278121 | Support unit, substrate treating apparatus including the same, and substrate treating method | Kangseop Yun, Seung Hoon Oh, Youngil Lee, Byungsun Bang, Jungbong Choi +1 more | 2025-04-15 |