Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399134 | Substrate inspection apparatus and substrate treatment system including the same | Jeong-Hoon Han, Jun Hyun LIM, Dong Min PARK | 2025-08-26 |
| 12217977 | Method and apparatus for treating substrate | Soo Young Park, Soo Yeon Shin | 2025-02-04 |