Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198943 | Substrate processing apparatus, process fluid treating apparatus, and ozone decomposition method | Seung-Hwan Cho | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198943 | Substrate processing apparatus, process fluid treating apparatus, and ozone decomposition method | Seung-Hwan Cho | 2025-01-14 |