Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320735 | Bubble measurement unit, substrate treating apparatus including the same, and bubble measurement method | Jung Suk GOH, A Rah CHO, Hyungmin Park, Linfeng PIAO, Jungjin Lee | 2025-06-03 |