Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410368 | Etching gas composition, substrate processing apparatus, and pattern forming method using the etching gas composition | Kyungseok Min, Sukjune An | 2025-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410368 | Etching gas composition, substrate processing apparatus, and pattern forming method using the etching gas composition | Kyungseok Min, Sukjune An | 2025-09-09 |