Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278118 | Substrate processing apparatus and substrate processing method including processing liquid supply unit | Seung Tae YANG, Jong Han Kim | 2025-04-15 |
| 12272544 | Apparatus for treating substrate and method for treating substrate | Moon Soon Choi, Young Joon HAN, Seung Tae YANG | 2025-04-08 |
| 12266546 | Unit for supplying liquid, apparatus and method for treating substrate with the unit | Tae Suk YUN, Moon Soon Choi, Gu Yeol AN, Chae-young Lim, Bu Young JUNG | 2025-04-01 |