Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387952 | Substrate processing method including thickness monitoring | Takashi Ota, Takao Itahara, Kyohei Nakanishi, Tatsuya SHIMANO | 2025-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387952 | Substrate processing method including thickness monitoring | Takashi Ota, Takao Itahara, Kyohei Nakanishi, Tatsuya SHIMANO | 2025-08-12 |