Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431369 | Substrate processing apparatus | Kazuhiro SHOJI, Ryo MURAMOTO | 2025-09-30 |
| 12424473 | Centering device, centering method and substrate processing apparatus | Itsuki Kajino, Shoyo MINAMI | 2025-09-23 |