Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271830 | Learned model generating method, abnormality factor estimating device, substrate processing device, abnormality factor estimating method, learning method, learning device, and learning data generating method | Asuka Wakita, Takashi Ota | 2025-04-08 |