Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362167 | Method for producing liquid containing sublimable substance, substrate drying method, and substrate processing apparatus | Naozumi Fujiwara, Yuta SASAKI | 2025-07-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362167 | Method for producing liquid containing sublimable substance, substrate drying method, and substrate processing apparatus | Naozumi Fujiwara, Yuta SASAKI | 2025-07-15 |