Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334366 | Substrate processing apparatus and substrate processing method | Sei NEGORO | 2025-06-17 |
| 12308258 | Substrate processing apparatus and substrate processing method | Tomohiro Takahashi, Takuya Kishida, Kei TAKECHI | 2025-05-20 |