Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358028 | Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning method | Megumi Uno, Akira Fukunaga, Chikako TAKATOH | 2025-07-15 |
| 12251738 | Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool | Megumi Uno, Akira Fukunaga, Chikako TAKATOH | 2025-03-18 |