Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276025 | Substrate processing apparatus and substrate processing method | Kwang-Ryul Kim, Jin Hee HONG | 2025-04-15 |
| 12255050 | Antenna member and apparatus for treating substrate | Yoon Seok Choi, Sun Wook JUNG | 2025-03-18 |