Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372885 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Seok Heo, Cha-Won Koh, Sang Joon Hong, Hyun-Woo Kim, Kyung Won Kang +3 more | 2025-07-29 |