Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405308 | Control program, container and semiconductor device manufacturing system for charging of wafer type sensor and auto teaching | In Kyu Park | 2025-09-02 |
| 12313392 | Apparatus and method for measuring the gap | Chung Woo Lee, Sung Youn Jeon, In Kyu Park | 2025-05-27 |
| 12207362 | Support unit, substrate treating apparatus including the same and temperature control method | Chung Woo Lee, In Kyu Park, Sung Youn Jeon | 2025-01-21 |