Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326402 | Vibration insensitive interferometry for measuring thickness and profile of multilayer thin-film | Yong-sik Ghim, Hyug-gyo Rhee | 2025-06-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326402 | Vibration insensitive interferometry for measuring thickness and profile of multilayer thin-film | Yong-sik Ghim, Hyug-gyo Rhee | 2025-06-10 |