Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424422 | Plasma processing apparatus and semiconductor device manufacturing method | Wonsuk Yang, Seunghyun Chung, Myoungsoo KIM, Seunghun Seo, Woojin Song +1 more | 2025-09-23 |