Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12234400 | Etchant composition for etching silicon germanium film and method of manufacturing integrated circuit device by using the same | Changjun PARK, Jaesung Lee, Jungmin OH, Sangwon BAE, Hyosan Lee | 2025-02-25 |