Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315703 | Plasma processing apparatus and methods of manufacturing semiconductor device using the same | Kyoungchon Kim, Taemin Earmme, Kwangnam Kim | 2025-05-27 |
| 12211672 | Apparatus and method for plasma etching | Kyohyeok Kim, Taehwa Kim, Haejoong Park, Jewoo Han | 2025-01-28 |