Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431341 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Kyunghyun Kim +3 more | 2025-09-30 |