Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293901 | Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices | Woorim LEE, Sunggil Kang, Gonjun KIM, Younghoo Kim | 2025-05-06 |