Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424465 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Hyunsoo Chun, Jiho Uh | 2025-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424465 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Hyunsoo Chun, Jiho Uh | 2025-09-23 |