Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346022 | Method of fabricating pellicle structure | Mun Ja Kim, Ji-Beom Yoo, Ki Bong Nam, Jin Ho Yeo, Qicheng Hu | 2025-07-01 |
| 12281243 | Method of removing an adhesive for an EUV mask and method of reusing an EUV mask | Byungchul Yoo, Byunghoon Lee, Myungjun KIM, Jikang KIM, Jeonghwan MIN +1 more | 2025-04-22 |
| 12258494 | Adhesive for pellicle, pellicle for photo mask and method for manufacturing the same | Mun Ja Kim | 2025-03-25 |