Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12280466 | Substrate polishing apparatus, substrate polishing system including the same, and substrate polishing method using the same | Jaehyug Lee, Hoyoung Kim, Seungjun Lee | 2025-04-22 |