Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230514 | Substrate processing apparatus including filling gas supply line and substrate processing method using the same | Heeyeon Kim, Homin Son, Geunkyu Choi | 2025-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230514 | Substrate processing apparatus including filling gas supply line and substrate processing method using the same | Heeyeon Kim, Homin Son, Geunkyu Choi | 2025-02-18 |